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<p>以下为报告精华内容分享:</p>

<p><strong>报告认为&nbsp;&nbsp;</strong></p>

<p><strong>1、</strong>深圳市MEMS产业下游应用需求旺盛,核心产品紧系电子信息产业主动脉。</p>

<p><strong>2、</strong>MEMS制造环节短板突出,亟需构建中试服务平台,助力中小企提速发展。</p>

<p><strong>3、</strong>深圳市在多个MEMS细分赛道具备先发优势,有望培育出若干独角兽。</p>

<p><strong>4、</strong>MEMS特色工艺种类多、难度大,强化高端MEMS人才引育是“关键一招”。</p>

<p><strong>(一)MEMS的定义</strong><em><strong>01&nbsp;</strong></em><strong>MEMS技术概览</strong></p>

<p><strong>微机电系统</strong>(Micro Electro-Mechanical System,简称<strong>MEMS</strong>),是在微电子技术(半导体制造技术)基础上发展起来的,融合了光刻、腐蚀、薄膜、LIGA、硅微加工、非硅微加工和精密机械加工等技术制作的电子机械器件。<strong>MEMS</strong>具有微型化、智能化、高集成度和适于大批量生产、多学科交叉等特征。</p>

<p><img alt="深圳MEMS产业发展白皮书" data-entity-type="file" data-entity-uuid="da1e5890-6d04-4175-a296-ba0b5b7b1704" src="http://new.eetrend.com/files/2021-03/wen_zhang_/100063067-126268-1.jpg&…; /></p>

<p><em>图片来源:互联网</em></p>

<p><strong>(二)MEMS器件分类</strong></p>

<p>MEMS器件根据其技术原理可分为四类:传感MEMS、生物MEMS、光学MEMS和射频MEMS。</p>

<p><img alt="图片来源:创新中心智能经济研究所" data-entity-type="file" data-entity-uuid="55724769-313b-4740-9f6c-b6753c5ed1d8" src="http://new.eetrend.com/files/2021-03/wen_zhang_/100063067-126269-2.png&…; /></p>

<p><em>图片来源:创新中心智能经济研究所</em></p>

<p><em><strong>02</strong></em><strong>&nbsp;MEMS产业链</strong></p>

<p>MEMS整个产业链涉及设计、制造、封装测试、软件及应用方案环节。MEMS产业链的上游负责MEMS器件设计、材料和生产设备供应,中游生产制造出MEMS器件,下游使用MEMS器件制造终端电子产品。</p>

<p><img alt="MEMS生产制造工艺流程图" data-entity-type="file" data-entity-uuid="11598c07-e656-4aab-ab7d-50955e1003d9" src="http://new.eetrend.com/files/2021-03/wen_zhang_/100063067-126270-3.png&…; /></p>

<p><em>图:MEMS生产制造工艺流程图</em></p>

<p><em>资料来源:创新中心智能经济研究所</em></p>

<p><em><strong>03&nbsp;</strong></em><strong>MEMS产业市场格局</strong></p>

<p><strong>(一)全球市场格局</strong></p>

<p><strong>1.全球MEMS行业市场规模保持稳定增长。</strong></p>

<p>据IC Insights统计,2019年全球MEMS产业市场销售额超140亿美元,同比增长10%,预计未来几年全球MEMS市场将以15%的年复合增长率增长,到2023年市场规模突破200亿美元。</p>

<p><img alt="全球MEMS市场规模统计及预测   " data-entity-type="file" data-entity-uuid="1890b054-f361-4ee4-973f-5fc1fd5f49c4" src="http://new.eetrend.com/files/2021-03/wen_zhang_/100063067-126271-4.png&…; /></p>

<p><em>图:全球MEMS市场规模统计及预测&nbsp; &nbsp;</em></p>

<p><em>资料来源:IC Insights</em></p>

<p><strong>2.细分领域呈现寡头垄断的分布格局。</strong></p>

<p>据Yole Development公布的2018年全球MEMS元件厂商TOP30企业榜单,TOP30企业的总销售额高达103亿美元(占全行业81%)。其中,美国排名前30的厂商有12家,市场份额占比45.63%,主要包括RF MEMS、压力传感器、惯性传感器、温湿传感器、MEMS麦克风等细分领域;日本排名前30的厂商有10家,市场份额占比18.97%,主要包括图像传感器、继电器、喷墨打印头、压力传感器等领域;而中国只有歌尔和瑞声两家企业上榜,主要生产MEMS麦克风。</p>

<p><img alt="2018年全球TOP30MEMS元件制造厂商" data-entity-type="file" data-entity-uuid="5c00ce05-dcbd-489c-bb9f-f587bd83049e" src="http://new.eetrend.com/files/2021-03/wen_zhang_/100063067-126272-5.jpg&…; /></p>

<p><em>图:2018年全球TOP30MEMS元件制造厂商</em></p>

<p><em>资料来源:Yole Development</em></p>

<p><strong>3.欧美MEMS代工厂具有压倒性优势。</strong></p>

<p>据Yole Development 发布的2018年全球MEMS代工厂发展报告,提供MEMS代工的IDM厂商主要有ST、索尼、TI等,台积电MEMS代工业务也排在前列。从MEMS代工业务规模来看,TOP1为美国的ST,每2台手机中就有1颗ST MEMS传感器,其开展MEMS代工业务已有20余年。TOP2为加拿大的Teledyne DALSA,是全球最大的纯MEMS 代工厂。TOP4是中国耐威科技控股公司Silex Microsystems AB,在纯MEMS代工厂中排名第二。</p>

<p><img alt="2018年全球排名前30的MEMS代工厂   " data-entity-type="file" data-entity-uuid="edd25e70-b40a-4269-b8c3-db8b3db64707" src="http://new.eetrend.com/files/2021-03/wen_zhang_/100063067-126273-6.jpg&…; /></p>

<p><em>图:2018年全球排名前30的MEMS代工厂&nbsp; &nbsp;</em></p>

<p><em>资料来源:Yole Development</em></p>

<p><strong>(二)国内市场格局</strong></p>

<p><strong>1.中国成全球MEMS市场增长最快地区。</strong></p>

<p>近年来,受益于消费电子类产品,如智能手机、平板电脑等产量保持稳定增长,带动加速传感器、陀螺仪、硅麦克风等MEMS行业需求的增长,中国成为全球MEMS市场发展最快的地区。据赛迪智库统计,2018年中国MEMS整体市场规模达到504.3亿元,预计到2021年将达到851.1亿元。</p>

<p><img alt="2016-2021年中国MEMS行业市场规模及预测 " data-entity-type="file" data-entity-uuid="7d845d09-0cad-4815-b6be-b0b5daf39823" src="http://new.eetrend.com/files/2021-03/wen_zhang_/100063067-126274-7.png&…; /></p>

<p><em>图:2016-2021年中国MEMS行业市场规模及预测&nbsp;</em></p>

<p><em>资料来源:赛迪智库</em></p>

<p><strong>2.长三角是我国MEMS产业发展主阵地。</strong></p>

<p>据中国信通院统计数据,2018年我国MEMS传感器制造企业大约有200家,主要集中在长三角地区,占比超60%,其中江苏省占比接近30%。主要得益于长三角良好的集成电路产业基础,硅基MEMS研发及代工生产线资源较多,产业链配套较完善。</p>

<p><img alt="中国智能传感器产业地图 " data-entity-type="file" data-entity-uuid="ecf69a9e-f783-408e-ae4d-9861937281d1" src="http://new.eetrend.com/files/2021-03/wen_zhang_/100063067-126275-8.jpg&…; /></p>

<p><em>图:中国智能传感器产业地图&nbsp;</em></p>

<p><em>资料来源:中国信通院</em></p>

<p><em><strong>04&nbsp;</strong></em><strong>深圳MEMS产业概况</strong></p>

<p><strong>1.深圳市MEMS下游应用市场规模全国最大。</strong></p>

<p>MEMS传感器作为手机、电脑、智能穿戴、无人机、机器人等各类智能产品必备的核心零部件,是电子信息行业众多制造企业生存和发展的根本。深圳作为世界级的电子信息产业基地,在汽车电子、智能手机、智能穿戴、生物医疗、机器人、AR/VR、无人机、卫星及工业互联网等领域拥有大批国内外知名的厂商,对各类MEMS传感器存在巨大市场需求量。</p>

<p>表:深圳市相关MEMS传感器下游应用企业</p>

<table style="width: 660px;" width="465">
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<p><strong>应用领域</strong></p>
</section>
</section>
</td>
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<p><strong>下游应用企业</strong></p>
</section>
</section>
</td>
</tr>
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<p><strong>汽车电子</strong></p>
</section>
</section>
</td>
<td colspan="1" opera-tn-ra-cell="_$.pages:0.layers:0.comps:2.col1:23.col1:2.classicTable1:1.td@@1" rowspan="1" style="width: 490px;" width="70.0000%">
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<p>比亚迪、索菱实业、豪恩汽车电子、陆地方舟电动车、金溢科技、航盛电子等</p>
</section>
</section>
</td>
</tr>
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<p><strong>智能手机</strong></p>
</section>
</section>
</td>
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<section>
<p>华为、中兴通讯、努比亚等</p>
</section>
</section>
</td>
</tr>
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<section>
<p><strong>可穿戴设备</strong></p>
</section>
</section>
</td>
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<section powered-by="xiumi.us">
<section>
<p>倍轻松科技、华为、腾讯、创维数字等</p>
</section>
</section>
</td>
</tr>
<tr opera-tn-ra-comp="_$.pages:0.layers:0.comps:2.col1:23.col1:2.classicTable1:4" powered-by="xiumi.us">
<td colspan="1" opera-tn-ra-cell="_$.pages:0.layers:0.comps:2.col1:23.col1:2.classicTable1:4.td@@0" rowspan="1" width="30.0000%">
<section powered-by="xiumi.us">
<section>
<p><strong>生物医疗</strong></p>
</section>
</section>
</td>
<td colspan="1" opera-tn-ra-cell="_$.pages:0.layers:0.comps:2.col1:23.col1:2.classicTable1:4.td@@1" rowspan="1" style="width: 490px;" width="70.0000%">
<section powered-by="xiumi.us">
<section>
<p>迈瑞医疗、微点生物技术、康美生物、美的连医疗电子、慧康医疗、易瑞生物等</p>
</section>
</section>
</td>
</tr>
<tr opera-tn-ra-comp="_$.pages:0.layers:0.comps:2.col1:23.col1:2.classicTable1:5" powered-by="xiumi.us">
<td colspan="1" opera-tn-ra-cell="_$.pages:0.layers:0.comps:2.col1:23.col1:2.classicTable1:5.td@@0" rowspan="1" width="30.0000%">
<section powered-by="xiumi.us">
<section>
<p><strong>卫星制造</strong></p>
</section>
</section>
</td>
<td colspan="1" opera-tn-ra-cell="_$.pages:0.layers:0.comps:2.col1:23.col1:2.classicTable1:5.td@@1" rowspan="1" style="width: 490px;" width="70.0000%">
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<section>
<p>航天科技创新研究院、东方红海特卫星、亚太卫星、中兴通讯等</p>
</section>
</section>
</td>
</tr>
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<section>
<p><strong>物联网</strong></p>
</section>
</section>
</td>
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<p>远望谷、国民技术、芯邦科技、九洲电器等</p>
</section>
</section>
</td>
</tr>
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<p><strong>机器人</strong></p>
</section>
</section>
</td>
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<p>优必选、银星智能、创客工场科技、乐行天下科技等</p>
</section>
</section>
</td>
</tr>
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<p><strong>AR/VR</strong></p>
</section>
</section>
</td>
<td colspan="1" opera-tn-ra-cell="_$.pages:0.layers:0.comps:2.col1:23.col1:2.classicTable1:8.td@@1" rowspan="1" style="width: 490px;" width="70.0000%">
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<section>
<p>欣旺达电子、看到科技、鼎界科技、丰唐物联技术(深圳)等</p>
</section>
</section>
</td>
</tr>
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<p><strong>工业互联网</strong></p>
</section>
</section>
</td>
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<p>富士康工业互联网、华龙迅达、金岷江机电设备等</p>
</section>
</section>
</td>
</tr>
<tr opera-tn-ra-comp="_$.pages:0.layers:0.comps:2.col1:23.col1:2.classicTable1:10" powered-by="xiumi.us">
<td colspan="1" opera-tn-ra-cell="_$.pages:0.layers:0.comps:2.col1:23.col1:2.classicTable1:10.td@@0" rowspan="1" width="30.0000%">
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<p><strong>无人机</strong></p>
</section>
</section>
</td>
<td colspan="1" opera-tn-ra-cell="_$.pages:0.layers:0.comps:2.col1:23.col1:2.classicTable1:10.td@@1" rowspan="1" style="width: 490px;" width="70.0000%">
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<p>大疆创新、科卫泰、高科新农、道通等</p>
</section>
</section>
</td>
</tr>
</tbody>
</table>

<p><em>资料来源:创新中心智能经济研究所</em></p>

<p><strong>2.深圳市MEMS产业总体呈现“小而精”的特征。</strong></p>

<p>据不完全统计,目前深圳市范围内研发、制造生产MEMS传感器的相关企业共计62家,其中上市公司13家,南山区和宝安区占比超半数。既有瑞声声学、精量电子等技术积累雄厚的老牌企业,也不乏速腾聚创、镭神智能等拥有强大研发实力的后起之秀,产品涉及范围十分广泛,涵盖航空航天、能源、医疗、交通、民生等领域。<strong>深圳的MEMS产业总体上呈现“小而精”的特点</strong>,多个细分领域拥有一批国内外具有一定影响力的科技创新型企业,但企业的规模普遍较小。</p>

<p><img alt="深圳市MEMS企业地区分布概览 " data-entity-type="file" data-entity-uuid="387834df-cfc6-43d4-aa5a-48d319a8cbcd" src="http://new.eetrend.com/files/2021-03/wen_zhang_/100063067-126276-9.png&…; /></p>

<p><em>图:深圳市MEMS企业地区分布概览&nbsp;</em></p>

<p><em>资料来源:创新中心智能经济研究所</em></p>

<p>表:深圳市MEMS细分领域重点企业</p>

<table style="width: 526px;" width="465">
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<p><strong>细分领域</strong></p>
</section>
</section>
</td>
<td colspan="1" opera-tn-ra-cell="_$.pages:0.layers:0.comps:2.col1:23.col1:9.classicTable1:0.td@@1" rowspan="1" style="width: 362px;" width="67.0000%">
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<p><strong>重点企业</strong></p>
</section>
</section>
</td>
</tr>
<tr opera-tn-ra-comp="_$.pages:0.layers:0.comps:2.col1:23.col1:9.classicTable1:1" powered-by="xiumi.us">
<td colspan="1" opera-tn-ra-cell="_$.pages:0.layers:0.comps:2.col1:23.col1:9.classicTable1:1.td@@0" rowspan="1" width="33.0000%">
<section powered-by="xiumi.us">
<section>
<p>MEMS激光雷达</p>
</section>
</section>
</td>
<td colspan="1" opera-tn-ra-cell="_$.pages:0.layers:0.comps:2.col1:23.col1:9.classicTable1:1.td@@1" rowspan="1" style="width: 362px;" width="67.0000%">
<section powered-by="xiumi.us">
<section>
<p>速腾聚创、镭神智能、大疆Livox、奥比中光等</p>
</section>
</section>
</td>
</tr>
<tr opera-tn-ra-comp="_$.pages:0.layers:0.comps:2.col1:23.col1:9.classicTable1:2" powered-by="xiumi.us">
<td colspan="1" opera-tn-ra-cell="_$.pages:0.layers:0.comps:2.col1:23.col1:9.classicTable1:2.td@@0" rowspan="1" width="33.0000%">
<section powered-by="xiumi.us">
<section>
<p>MEMS麦克风</p>
</section>
</section>
</td>
<td colspan="1" opera-tn-ra-cell="_$.pages:0.layers:0.comps:2.col1:23.col1:9.classicTable1:2.td@@1" rowspan="1" style="width: 362px;" width="67.0000%">
<section powered-by="xiumi.us">
<section>
<p>瑞声声学、意法半导体(深圳)、韶音科技等</p>
</section>
</section>
</td>
</tr>
<tr opera-tn-ra-comp="_$.pages:0.layers:0.comps:2.col1:23.col1:9.classicTable1:3" powered-by="xiumi.us">
<td colspan="1" opera-tn-ra-cell="_$.pages:0.layers:0.comps:2.col1:23.col1:9.classicTable1:3.td@@0" rowspan="1" width="33.0000%">
<section powered-by="xiumi.us">
<section>
<p>MEMS陀螺仪</p>
</section>
</section>
</td>
<td colspan="1" opera-tn-ra-cell="_$.pages:0.layers:0.comps:2.col1:23.col1:9.classicTable1:3.td@@1" rowspan="1" style="width: 362px;" width="67.0000%">
<section powered-by="xiumi.us">
<section>
<p>格物感知、萃进科技、易佳杰电子、铭之光电子等</p>
</section>
</section>
</td>
</tr>
<tr opera-tn-ra-comp="_$.pages:0.layers:0.comps:2.col1:23.col1:9.classicTable1:4" powered-by="xiumi.us">
<td colspan="1" opera-tn-ra-cell="_$.pages:0.layers:0.comps:2.col1:23.col1:9.classicTable1:4.td@@0" rowspan="1" width="33.0000%">
<section powered-by="xiumi.us">
<section>
<p>MEMS</p>

<p>压力传感器</p>
</section>
</section>
</td>
<td colspan="1" opera-tn-ra-cell="_$.pages:0.layers:0.comps:2.col1:23.col1:9.classicTable1:4.td@@1" rowspan="1" style="width: 362px;" width="67.0000%">
<section powered-by="xiumi.us">
<section>
<p>精量电子、信立科技、安培龙、力准传感、合微集成等</p>
</section>
</section>
</td>
</tr>
<tr opera-tn-ra-comp="_$.pages:0.layers:0.comps:2.col1:23.col1:9.classicTable1:5" powered-by="xiumi.us">
<td colspan="1" opera-tn-ra-cell="_$.pages:0.layers:0.comps:2.col1:23.col1:9.classicTable1:5.td@@0" rowspan="1" width="33.0000%">
<section powered-by="xiumi.us">
<section>
<p>射频MEMS</p>
</section>
</section>
</td>
<td colspan="1" opera-tn-ra-cell="_$.pages:0.layers:0.comps:2.col1:23.col1:9.classicTable1:5.td@@1" rowspan="1" style="width: 362px;" width="67.0000%">
<section powered-by="xiumi.us">
<section>
<p>信维通信、深圳飞骧等</p>
</section>
</section>
</td>
</tr>
<tr opera-tn-ra-comp="_$.pages:0.layers:0.comps:2.col1:23.col1:9.classicTable1:6" powered-by="xiumi.us">
<td colspan="1" opera-tn-ra-cell="_$.pages:0.layers:0.comps:2.col1:23.col1:9.classicTable1:6.td@@0" rowspan="1" width="33.0000%">
<section powered-by="xiumi.us">
<section>
<p>生物MEMS</p>
</section>
</section>
</td>
<td colspan="1" opera-tn-ra-cell="_$.pages:0.layers:0.comps:2.col1:23.col1:9.classicTable1:6.td@@1" rowspan="1" style="width: 362px;" width="67.0000%">
<section powered-by="xiumi.us">
<section>
<p>华大基因、微点生物、普瑞康、北芯生命科技等</p>
</section>
</section>
</td>
</tr>
</tbody>
</table>

<p><em>资料来源:创新中心智能经济研究所</em></p>

<p><strong>3.深圳市MEMS产业链制造短板凸显。</strong></p>

<p>目前,中国的MEMS中试、代工及IDM生产线主要分布在长三角地区。<strong>深圳乃至粤港澳大湾区尚无一条可以满足多种MEMS产品制造、封装、测试需求的晶圆生产线</strong>,无法满足设计企业、研究机构开发新产品的加工试制、测试需要,造成本地MEMS产业生态圈失衡。据多家本地企业反映,其主要到苏州、上海等地寻求晶圆代工服务进行产品中试验证。此外,由于深圳市在MEMS制造环节的配套不完善,企业从战略布局的角度考虑可能不会优先选择落地深圳。</p>

<p>表:国内MEMS晶圆产线分布情况</p>

<p><img alt="国内MEMS晶圆产线分布情况" data-entity-type="file" data-entity-uuid="49f1f88f-e0a3-40b6-bbc5-974445641e7d" src="http://new.eetrend.com/files/2021-03/wen_zhang_/100063067-126277-10.png…; /></p>

<p><em>资料来源:创新中心智能经济研究所整理</em></p>

<p><em><strong>05&nbsp;</strong></em><strong>发展建议</strong></p>

<p><strong>1.突破共性核心技术,抢占战略发展制高点。</strong></p>

<p>重点围绕MEMS惯导组件、车规级MEMS激光雷达、工业级MEMS压电及力学传感器等高精度、高可靠性核心器件的共性通用技术,实施一批重大核心技术攻关专项,力争取得一批产业带动性强、自主可控的重大原创科技成果和自主知识产权,抢占MEMS产业高端价值链。</p>

<p><img alt="深圳MEMS产业发展白皮书" data-entity-type="file" data-entity-uuid="db3c4ff3-a877-4557-9c42-bb719b027d8d" src="http://new.eetrend.com/files/2021-03/wen_zhang_/100063067-126278-11.jpg…; /></p>

<p><em>图片来源:互联网</em></p>

<p><strong>2.建立MEMS中试平台,助力企业提速发展。</strong></p>

<p>以政府为主导搭建MEMS中试平台,围绕射频、压电、光学MEMS器件开展特色制造工艺的研发和中试,为广大中小企业开发新产品提供工艺技术开发、流片试制、中试验证、检测评估等公共服务,加速MEMS器件全流程研发创新,补齐制造短板,构建大湾区MEMS产业创新生态圈,促进MEMS产业高端化发展。</p>

<p><img alt="深圳MEMS产业发展白皮书" data-entity-type="file" data-entity-uuid="3e640954-49bf-4671-ae46-1e39e75909e0" src="http://new.eetrend.com/files/2021-03/wen_zhang_/100063067-126279-12.jpg…; /></p>

<p><em>图片来源:互联网</em></p>

<p><strong>3.面向全球“靶向引才”,构筑创新人才高地。</strong></p>

<p>设立MEMS行业稀缺人才特殊奖励政策,主动面向全球MEMS行业领军企业、研究机构和高校引进一批拥有丰富制造生产经验和先进工艺开发能力的顶级技术专家及工程师,助于本地MEMS企业迅速提升设计能力和工艺水平。同时,依托MEMS中试平台开展国际研发项目合作、共建联合实验室,培养一批MEMS领军人才,加强后备人才队伍建设。引进和培育“两手抓”,构建国际一流人才高地,激发创新活力。</p>

<p><img alt="深圳MEMS产业发展白皮书" data-entity-type="file" data-entity-uuid="ad2c6220-1fd4-49fc-bdb7-f839217d2814" src="http://new.eetrend.com/files/2021-03/wen_zhang_/100063067-126280-13.jpg…; /></p>

<p>白皮书来源:智能经济研究所</p>

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